DIFFER
DIFFER Publication

In depth study of molybdenum silicon compound formation at buried interfaces

Author
Year of Publication
2016
Journal
Journal of Applied Physics
Volume
120
Issue
11
Number of Pages
115303
DOI
10.1063/1.4962541
PId
ab68c7142108dab3a70d7e5f4669a241
Alternate Journal
J. Appl. Phys.
Label
OA
Attachment
Journal Article
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