DIFFER
DIFFER Publication
On the Use of H+ and Ar+ Ions for High Spatial-Resolution Depth Profiling
| Author | |
| Year of Publication |
1990
|
| Journal |
Vacuum
|
| Volume |
41
|
| Number |
4-6
|
| Number of Pages |
1327-1329
|
| Date Published |
1990
|
| ISBN Number |
0042-207X
|
| DOI |
10.1016/0042-207x(90)93948-i
|
| PId |
e134ce86fdf5e474822a3e2c5654fe3f
|
Journal Article
|
|
| Download citation |