DIFFER
DIFFER Publication

On the Use of H+ and Ar+ Ions for High Spatial-Resolution Depth Profiling

Label Value
Author
Year of Publication
1990
Journal
Vacuum
Volume
41
Number
4-6
Number of Pages
1327-1329
Date Published
1990
ISBN Number
0042-207X
DOI
PId
e134ce86fdf5e474822a3e2c5654fe3f
Journal Article
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