E. Louis

Louis, E., Yakshin, A. E., Tsarfati, T., & Bijkerk, F. (2011). Nanometer interface and materials control for multilayer EUV-optical applications. Progress in Surface Science, 86(11-12), 255-294. https://doi.org/10.1016/j.progsurf.2011.08.001 (Original work published 2011)

Chen, J. Q., Louis, E., Harmsen, R., Tsarfati, T., Wormeester, H., van Kampen, M., … Bijkerk, F. (2011). In situ ellipsometry study of atomic hydrogen etching of extreme ultraviolet induced carbon layers. Applied Surface Science, 258(1), 7-12. https://doi.org/10.1016/j.apsusc.2011.07.121 (Original work published 2011)

van den Boogaard, A. J. R., Louis, E., Zoethout, E., Goldberg, K. A., & Bijkerk, F. (2011). Characterization of Mo/Si multilayer growth on stepped topographies. Journal of Vacuum Science & Technology B, 29(5), 6. https://doi.org/10.1116/1.3628640 (Original work published 2011)

Sobierajski, R., Bruijn, S., Khorsand, A. R., Louis, E., van de Kruijs, R. W., Burian, T., … Bijkerk, F. (2011). Damage mechanisms of MoN/SiN multilayer optics for next-generation pulsed XUV light sources. Optics Express, 19(1), 193-205. https://doi.org/10.1364/OE.19.000193 (Original work published 2011)

van den Boogaard, A. J. R., Louis, E., Zoethout, E., Mullender, S., & Bijkerk, F. (2010). Surface morphology of Kr+-polished amorphous Si layers. Journal of Vacuum Science & Technology A, 28, 552-558. Retrieved from <Go to ISI>://000280479700009 (Original work published 2010)

Chen, J. Q., Louis, E., Verhoeven, J., Harmsen, R., Lee, C. J., Lubomska, M., … Bijkerk, F. (2010). Secondary electron yield measurements of carbon covered multilayer optics. Applied Surface Science, 257, 354-361. Retrieved from <Go to ISI>://000281674200003 (Original work published 2010)

Dobrovolskiy, S., Yakshin, A. E., Tichelaar, F. D., Verhoeven, J., Louis, E., & Bijkerk, F. (2010). Formation of Si/SiC multilayers by low-energy ion implantation and thermal annealing. Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions With Materials and Atoms, 268, 560-567. Retrieved from <Go to ISI>://000276053700004 (Original work published 2010)

Yakshin, A. E., Kozhevnikov, I. V., Zoethout, E., Louis, E., & Bijkerk, F. (2010). Properties of broadband depth-graded multilayer mirrors for EUV optical systems. Optics Express, 18, 6957-6971. Retrieved from <Go to ISI>://000276602000050 (Original work published 2010)

Tsarfati, T., van de Kruijs, R. W. E., Zoethout, E., Louis, E., & Bijkerk, F. (2010). Nitridation and contrast of B4C/La interfaces and X-ray multilayer optics. Thin Solid Films, 518, 7249-7252. Retrieved from <Go to ISI>://000282915100017 (Original work published 2010)

Khorsand, A. R., Sobierajski, R., Louis, E., Bruijn, S., van Hattum, E. D., van de Kruijs, R. W. E., … Bijkerk, F. (2010). Single shot damage mechanism of Mo/Si multilayer optics under intense pulsed XUV-exposure. Optics Express, 18, 700-712. Retrieved from <Go to ISI>://000273860400032 (Original work published 2010)