E. Louis

Chen, J. Q., Louis, E., Lee, C. J., Wormeester, H., Kunze, R., Schmidt, H., … Bijkerk, F. (2009). Detection and characterization of carbon contamination on EUV multilayer mirrors. Optics Express, 17, 16969-16979. Retrieved from <Go to ISI>://000269736100067 (Original work published 2009)

Chen, J. Q., Lee, C. J., Louis, E., Bijkerk, F., Kunze, R., Schmidt, H., … Moors, R. (2009). Characterization of EUV induced carbon films using laser-generated surface acoustic waves. Elsevier Science Sa. Retrieved from <Go to ISI>://000267737000017

Tsarfati, T., van de Kruijs, R. W., Zoethout, E., Louis, E., & Bijkerk, F. (2009). Reflective multilayer optics for 6.7 nm wavelength radiation sources and next generation lithography. Thin Solid Films, 518, 1365-1368. Retrieved from <Go to ISI>://000272861500002 (Original work published 2009)

van Herpen, M., van de Kruijs, R. W., Klunder, D. J. W., Louis, E., Yakshin, A. E., Alonso van der Westen, S., … Banine, V. (2008). Spectral-purity-enhancing layer for multilayer mirrors. Optics Letters, 33, 560-562. Retrieved from <Go to ISI>://000254907500010 (Original work published 2008)

van de Kruijs, R. W. E., Zoethout, E., Yakshin, A. E., Nedelcu, I., Louis, E., Enkisch, H., … Bijkerk, F. (2006). Nano-size crystallites in Mo/Si multilayer optics. Thin Solid Films, 515, 430-433. Retrieved from <Go to ISI>://000241220600011 (Original work published 2006)

Nedelcu, I., van de Kruijs, R. W., Yakshin, A. E., Tichelaar, F., Zoethout, E., Louis, E., … Bijkerk, F. (2006). Interface roughness in Mo/Si multilayers. Thin Solid Films, 515, 434-438. Retrieved from <Go to ISI>://000241220600012 (Original work published 2006)

Alink, L., van de Kruijs, R. W., Louis, E., Bijkerk, F., & Verhoeven, J. (2006). Improved temperature stability of Mo/Si multilayers by carbide based diffusion barriers through implantation of low energy CHx+ ions. Thin Solid Films, 510, 26-31. Retrieved from <Go to ISI>://000238011200005 (Original work published 2006)

Mertens, B., Weiss, M., Meiling, H., Klein, R., Louis, E., Kurt, R., … van de Kruijs, R. (2004). Progress in EUV optics lifetime expectations. Microelectronic Engineering, 73-74, 16-22. Retrieved from <Go to ISI>://000222145400005 (Original work published 2004)

Koster, N., Mertens, B., Jansen, R., van de Runstraat, A., Stietz, F., Wedowski, M., … Yakshin, A. (2002). Molecular contamination mitigation in EUVL by environmental control. Microelectronic Engineering, 61-2, 65-76. Retrieved from <Go to ISI>://000176594700009 (Original work published 2002)

Abdali, S., Gerward, L., Yakshin, A. E., Louis, E., & Bijkerk, F. (2002). Determination of crystallization as a function of Mo layer thickness in Mo/Si multilayers. Materials Research Bulletin, 37, 279-289. Retrieved from <Go to ISI>://000175048300009 (Original work published 2002)