DIFFER
DIFFER Publication
Improved temperature stability of Mo/Si multilayers by carbide based diffusion barriers through implantation of low energy CHx+ ions
| Author | |
| Year of Publication |
2006
|
| Journal |
Thin Solid Films
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| Volume |
510
|
| Number |
1-2
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| Number of Pages |
26-31
|
| Date Published |
Jul
|
| ISBN Number |
0040-6090
|
| Accession Number |
ISI:000238011200005
|
| URL |
<Go to ISI>://000238011200005
|
| PId |
9fc2c4666aca21be4306ef1bdc4a32cf
|
Journal Article
|
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| Download citation |