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DIFFER Publication
Label | Value |
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Author | |
Abstract |
Two different pairs of x-ray reflecting multilayer coatings have been tested in a double crystal monochromator configuration. The two pairs consisted of Ni (0.4 nm)-C (1.85 nm) and NiSi (0.4 nm)-C (1.85 nm), both with 225 periods. In order to determine the resolution in the energy range of 600-900 eV, the photoelectron yield of several 3d transition metal compounds was recorded as well as the throughput around the Ni L lines. We found for both pairs a resolving power of 220. Simulations taking into account the angular divergence of the x-ray beam yield a resolution of 250. The difference with the observed value can be due to the nonhomogeneity of the multilayer coating. |
Year of Publication |
1991
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Journal |
Journal of Vacuum Science & Technology a-Vacuum Surfaces and Films
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Volume |
9
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Number |
6
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Number of Pages |
3142-3148
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Date Published |
Nov-Dec
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ISBN Number |
0734-2101
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DOI | |
PId |
e3e9b2ce044b94aa97a94a531fe4a9e9
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Journal Article
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