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| Label | Value |
|---|---|
| Author | |
| Abstract |
Two different pairs of x-ray reflecting multilayer coatings have been tested in a double crystal monochromator configuration. The two pairs consisted of Ni (0.4 nm)-C (1.85 nm) and NiSi (0.4 nm)-C (1.85 nm), both with 225 periods. In order to determine the resolution in the energy range of 600-900 eV, the photoelectron yield of several 3d transition metal compounds was recorded as well as the throughput around the Ni L lines. We found for both pairs a resolving power of 220. Simulations taking into account the angular divergence of the x-ray beam yield a resolution of 250. The difference with the observed value can be due to the nonhomogeneity of the multilayer coating. |
| Year of Publication |
1991
|
| Journal |
Journal of Vacuum Science & Technology a-Vacuum Surfaces and Films
|
| Volume |
9
|
| Number |
6
|
| Number of Pages |
3142-3148
|
| Date Published |
Nov-Dec
|
| ISBN Number |
0734-2101
|
| DOI | |
| PId |
e3e9b2ce044b94aa97a94a531fe4a9e9
|
Journal Article
|
|
| Download citation |