DIFFER
Plasma Solar Fuels Devices Publications

Plasma Solar Fuels Devices Publications

Displaying 261 - 270 of 356

2012

H. C. M. Knoops, E. Langereis, M. C. M. van de Sanden, W. M. M. Kessels , Reaction mechanisms of atomic layer deposition of TaN(x) from Ta(NMe(2))(5) precursor and H(2)-based plasmas , Journal of Vacuum Science & Technology A , 30 (2012) 01A101, Article (01/2012), DOI
K. Sharma, M. A. Verheijen, M. C. M. van de Sanden, M. Creatore , In situ crystallization kinetics studies of plasma-deposited, hydrogenated amorphous silicon layers , Journal of Applied Physics , 111 (2012) 6, Article (02/2012), DOI
G. J. van Rooij, G. M. Wright , Diagnostics for erosion and deposition processes in fusion plasmas , Fusion Science and Technology , 61 (2012) 394-401, Article (02/2012)
H. C. M. Knoops, M. E. Donders, M. C. M. van de Sanden, P. H. L. Notten, W. M. M. Kessels , Atomic layer deposition for nanostructured Li-ion batteries , Journal of Vacuum Science & Technology A , 30 (2012) 010801, Review (01/2012), DOI
B. Hoex, M. C. M. van de Sanden, J. Schmidt, R. Brendel, W. M. M. Kessels , Surface passivation of phosphorus-diffused n(+)-type emitters by plasma-assisted atomic-layer deposited Al2O3 , Physica Status Solidi-Rapid Research Letters , 6 (2012) 4-6, Article (01/2012) ,Open Access , DOI
G. J. van Rooij , Laboratory experiments and devices to study plasma surface interaction , Fusion Science and Technology , 61 (2012) 266-272, Article (02/2012)
M. V. Ponomarev, M. A. Verheijen, W. Keuning, M. C. M. van de Sanden, M. Creatore , Controlling the resistivity gradient in aluminum-doped zinc oxide grown by plasma-enhanced chemical vapor deposition (vol 112, 043708, 2012) , Journal of Applied Physics , 6, 112 (2012) 1, Correction (09/2012), DOI
F. Law, B. Hoex, J. Wang, J. Luther, K. Sharma, M. Creatore, M. C. M. van de Sanden , Kinetic study of solid phase crystallisation of expanding thermal plasma deposited a-Si:H , Thin Solid Films , 520 (2012) 5820-5825, Article (06/2012), DOI
K. Sharma, M. V. Ponomarev, M. A. Verheijen, O. Kunz, F. D. Tichelaar, M. C. M. van de Sanden, M. Creatore , Solid-phase crystallization of ultra high growth rate amorphous silicon films , Journal of Applied Physics , 111 (2012) 5, Article; Proceedings Paper (05/2012), DOI
M. V. Ponomarev, K. Sharma, M. A. Verheijen, M. C. M. van de Sanden, M. Creatore , Improved conductivity of aluminum-doped ZnO: The effect of hydrogen diffusion from a hydrogenated amorphous silicon capping layer , Journal of Applied Physics , 111 (2012) 063715, Article (03/2012), DOI